Vol. 1 No. 2
Year: 2013
Issue: Mar-May
Title : A Complete Analytical Model for Circular Diaphragm Pressure Sensor with Clamped edge
Author Name : Sumit Kumar Jindal, S. K. Raghuwanshi
Synopsis :
MEMS offer various fabrication process to fabricate diaphragms for various applications such as microphones, capacitive sensors, pressure sensor, micro-pumps etc. The working principle of all the devices is based on the force uniformly applied on the diaphragm and cause the diaphragm to deflect. The parameter optimization of the diaphragm is a challenge in order to achieve the best performance of the device.
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